Boronization: deposition: 14.63 A/psi Boronization: 80 g of diborane(10%)/bottle at approx 1523 psi Boronization: Delta-P Angstroms Post Process Set Point Current Boronization: ------------------------------------------------------------------------------------------------------------- Boronization: 1/07/96 120 1756 Boronization: 1/22/96 50 732 Boronization: 1/28/96 119 1741 Boronization: 2/28/96 122 1785 Boronization: 8/17/96 41 600 Boronization: 8/26/96 91 1331 Boronization: 8/29/96 71 1039 Boronization: 6/23/97 71 1039 Boronization: 10/31/97 53 775 Boronization: 12/10/97 72 1053 D2 ECDC (00:40),He ECDC (01:45) bbot: 3 3300 Boronization: 12/13/97 122 1785 D2 ECDC (02:00),He ECDC (24:00) 6 3300 Boronization: 01/16/98 137 2004 D2 ECDC (02:00),He ECDC (24:00) 6 3400 Boronization: 02/10/98 133 1945 D2 ECDC (02:00),He ECDC (03:00) 6 3500 Boronization: 02/13/98 130 1901 D2 ECDC (02:00),He ECDC (48:00) 5 3500 Boronization: 02/20/98 130 1901 D2 ECDC (02:00),He ECDC (48:00) 5 3600 Boronization: 02/12/99 130 1901 D2 ECDC (02:00),He ECDC (38:00) tc3/tc6: 3.4/114 3300 Boronization: Boronization: TP2 down, running with 1/2 the throughput Boronization: Boronization: 03/02/99 67 980 He ECDC (02:00) tc3/tc2: 3.4/112 3600 set 3700 meas Boronization: 04/22/99 132 1930 He ECDC (02:00) tc6 request 105 mT 44/45/103 cm Boronization: 08/05/99 131 1916 He ECDC (02:00) tc6 request 105 mT 44/45/103 cm Boronization: 09/13/99 114 1667 He ECDC (04:15) tc6 request 85-95 mT 44/46/109 cm Boronization: 11/04/99 139 2034 He ECDC (02:30) tc6 request 95-98 mT 44/46/109 cm Boronization: 05/01/00 127 1858 He ECDC (15:40) tc6 request 90 mT 44/45/103 cm Boronization: 05/15/00 140 2048 D2 ECDC (07:00) tc6 request 90 mT 44/45/103 cm Boronization: 05/30/00 144 2106 D2 ECDC (06:40) tc6 request 100 mT 44/45/103 cm Boronization: 06/24/00 110 1609 He ECDC (06:40),He Glow (36:00) tc6 request 95 mT 44/45/103 cm Boronization: 08/28/00 140 2048 He ECDC (02:30) tc3/tc6/req 3.4/71/75 mT 44/45/103 cm Boronization: 09/11/00 140 2048 He ECDC (02:30) tc3/tc6/req 2.8/66/70 mT 44/45/103 cm Boronization: 09/26/00 110 1609 He ECDC (00:45) tc3/tc6/req 2.8/66/70 mT 44/45/103 cm Boronization: 10/15/00 100 1463 He ECDC (18:00),D2 ECDC (18:00) tc3/tc6/req 1.6/56/60 mT 44/45/103 cm Boronization: 10/19/00 140 2048 He ECDC (01:30) tc3/tc6/req 4.0/74/110 mT 44/45/103 cm Boronization: 11/03/00 122 1785 D2 ECDC (48:00) tc3/tc6/req 4.0/74/110 mT 44/45/103 cm Boronization: 12/11/00 140 2048 He ECDC (08:00) tc3/tc6/req 4.0/77/150 mT 44/45/100 cm Boronization: 06/12/01 140 2048 He ECDC (03:30) tc3/tc6/req 4.0/75/105 mT 44/45/100 cm Boronization: 06/27/01 140 2048 He ECDC (03:30) tc3/tc6/req 4.6/76/ 90 mT 44/45/103 cm Boronization: 07/12/01 140 2048 He ECDC (02:00),D2 ECDC (1:00) tc3/tc6/req 4.0/75/ 90 mT 44/45/103 cm Boronization: 07/22/01 140 2048 He ECDC (05:00) tc3/tc6/req 4.0/75/ 90 mT 44/45/103 cm Boronization: 07/15/02 140 2048 None tc3/tc6/req 4.0/93/102 mT 44/45/103 cm Boronization: 08/15/02 140 2048 D2 ECDC (01:00) on/off 0.80/.40 tc3/tc6/req 4.0/93/102 mT 44/45/103 cm Boronization: 09/19/02 140 2048 D2 ECDC (01:00) on/off 0.75/.25 tc3/tc6/req 5.8/88/ 90 mT 44/45/103 cm Boronization: 10/07/02 112 1638 D2 ECDC (00:30) on/off 0.75/.25 tc3/tc6/req 5.2/92.5/90 mT 44/45/103 cm Boronization: 10/23/02 112 1638 D2 ECDC (00:30) on/off 0.75/.25 tc3/tc6/req 5.2/92.5/90 mT 44/45/103 cm Boronization: 11/04/02 140 2048 D2 ECDC (04:00) on/off 0.75/.25 tc3/tc6/req 5.2/92.5/90 mT 44/45/103 cm Boronization: 05/12/03 140 2048 He ECDC (04:00) on/off 0.75/.25 tc3/tc6/req 5.2/92.5/90 mT 44/45/103 cm Boronization: 05/30/03 180 2632 D2 ECDC (60:00) on/off 0.75/.25 tc3/tc6/req 5.2/95.0/112 mT 44/45/103 cm Boronization: 06/16/03 160 2340 D2 ECDC (01:30) on/off 0.75/.25 tc3/tc6/req 4.3/??.0/90 mT 44/45/103 cm Boronization: 07/07/03 140 2048 D2 ECDC (03:30) on/off 0.75/.25 tc3/tc6/req 5.2/95.0/85 mT 44/45/103 cm Boronization: 11/06/03 140 2048 D2 ECDC (01:30) on/off 0.75/.25 tc3/tc6/req 4.6/87.5/90 mT 44/45/103 cm Boronization: 12/04/03 100 1462 D2 ECDC (04:30) on/off 0.75/.25 tc3/tc6/req 4.0/82.5/120 mT 44/45/103 cm Boronization: 12/15/03 100 1462 He ECDC (07:30) on/off 0.65/.50 tc3/tc6/req 4.0/82.5/120 mT 44/45/103 cm Boronization: 01/06/03 120 1780 He ECDC (03:00) on/off 0.75/.50 tc3/tc6/req 4.0/82.5/130 mT 44/45/103 cm Boronization: 02/11/04 123 1780 He ECDC (02:30) on/off 0.75/.25 tc3/tc6/req 4.0/87.5/90 mT 44/45/103 cm Boronization: 03/08/04 120 1780 He ECDC (04:00) on/off 0.75/.25 tc3/tc6/req 4.6/95.0/90 mT 44/45/103 cm Boronization: 03/17/04 120 1780 He ECDC (04:15) on/off 0.75/.25 tc3/tc6/req 4.6/95.0/90 mT 44/45/103 cm Boronization: 03/22/04 120 1780 He ECDC (04:45) on/off 0.75/.25 tc3/tc6/req 4.6/90.0/90 mT 44/45/103 cm Boronization: 03/31/04 120 1780 He ECDC (04:00) on/off 0.75/.25 tc3/tc6/req 5.8/100 /90 mT 44/45/103 cm Boronization: 04/15/04 120 1780 He ECDC (04:00) on/off 0.75/.25 tc3/tc6/req 5.2/95 /90 mT 44/45/103 cm